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Semiconductor Process

exchangealt 中文
  • Update Date：2026-03-06
  • Units：Instrumentation Resource Center
[Guangfu] Manual Mask Aligner
Manual Mask Aligner
  • Manual Mask Aligner
    • Abreviation:  Aligner
    • Brand:  Chian Chyi Jeng Technology
    • Model:  CM-4-LED
  • Instrument expert:  Prof. Lien, Der-Hsien (Danny)
  • Instrument Operation Technician: Chi, Chih-Liang
  • Instrument Location: Room 220, Nano Facility Center
Instrument brand, model, year of purchase
Brand:  Chian Chyi Jeng Technology
Model:  CM-4-LED
Year of Purchase: 2023.12

Important Specifications
  1. Light Source: 365 nm UV LED
  2. Wavelength: I-line 365 nm   
  3. Illuminance: ≥ 20 mW/cm² (I-line)
  4. Power Supply Operating Mode: Constant Voltage (CP mode)
  5. Mask Size: 127 × 127 mm mask holder (bottom load), 1 pc
  6. Light Source Parallelism Angle: ≤ ±2.5°
  7. Illuminance Uniformity: ≤ ±3%
  8. Effective Exposure Area (Collimated Light): Ø100 mm
  9. Exposure Modes: Proximity Soft Contact & Hard Contact
  10. Sample:  The sample stage can accommodate 4-inch wafers or broken wafer pieces
Services
    Align process:  Align and exposure

Opening Hours
  1.  1. Monday to Friday：09:00 ~ 16:00
     2. Nights, Saturdays, and Sundays:  Closed
System opening level
  1. General working hours: Level D
  2. Night and holiday hours: Closed
Level Description
  • Level A: Open to students who need to use it. They can operate it independently after training and assessment.
  • Level B: Each professor nominates one student for training, while the rest operate under those who have been trained. Professors with multiple students using the instrument can request an increase in the number of students receiving training.
  • Level C: The instrument administrator selects several students recommended by the professor to receive training. After passing the assessment, they can operate the instrument independently and be responsible for the delegated operation service.
  • Level D: The laboratory's technical staff only accept delegated services and are unavailable for general use.
Charging standards
  Academic Units Research Units Manufacturers
Align Process(Within 3 wafers)
(Not 2nd layer Align)		 NT$ 1,500  NT$2,000 NT$6,000
Align Process(Within 3 wafers)
(2nd layer Align) 		 NT$2,000 NT$2,500  NT$7,000
Management and Usage Guidelines:
  1. The usage priority of this equipment is given first to semiconductor teaching, followed by contract manufacturing.
  2. For contract manufacturing, please contact the equipment management personnel via email in advance.
  3.  During the second exposure step of contract manufacturing, the applicant must be present to confirm alignment positions in order to avoid disputes.
Instrument List of GuanFu and Boai Campus Semiconductor Process
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