<![CDATA[Dual beam [focused ion beam & electron beam] System (FIB)]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="DUAL BEAM [FOCUSED ION BEAM & ELECTRON BEAM] SYSTEM" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168746622876651520&init=N" /></div>
<div class="ed_list">
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e8%81%9a%e7%84%a6%e9%9b%a2%e5%ad%90%e6%9d%9f%e8%88%87%e9%9b%bb%e5%ad%90%e6%9d%9f%e9%a1%af%e5%be%ae%e7%b3%bb%e7%b5%b1-dual-beam-focused-ion-beam-electron-beam-system-fib/" rel="noreferrer noopener" target="_blank" title="Dual beam [focused ion beam & electron beam] System FIB(Open New Windows)"><strong>Dual beam [focused ion beam & electron beam] System FIB</strong></a><br />
Brand model: TESCAN GAIA3</li>
<li><strong>Instrument expert: Prof. Wu, Yew-Chung</strong><br />
03-5712121 ext 31555</li>
<li><strong>Instrument expert: Prof. Tsui, Bing-Yue</strong><br />
03-5712121 ext 31570</li>
<li><strong>Equipment management personnel: Mr. Chao , Jerry</strong> <br />
03-5712121 ext 55670, 55368<br />
Email<a href="mailto:mailto:jychaoa@nycu.edu.tw" title=" jychaoa@nycu.edu.tw"> jychaoa@nycu.edu.tw</a></li>
<li><strong>Instrument location: Room 213, Engineering Sixth Building, Guanfu Campus</strong></li>
</ul>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2026-05-21Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/dual-beam-focused-ion-beam-electron-beam-system-fib/" title="Link to Nano Center Introduction Page"> Nano Facility Center</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li>Brand model: TESCAN GAIA3</li>
<li>Purchase period: December 18, 2017</li>
<li>Place of placement: Room 213, Engineering Sixth Building, Guanfu Campus (TEL: 55368) </li>
<li>Function:
<ul>
<li>Preparation of in-situ and ex-situ TEM specimens for transmission electron microscopy</li>
<li>Nanostructure manufacturing process: manufacturing process and observation of specific pattern structure of nanomaterials and components</li>
<li>Production and observation of cross-sectional test pieces: cutting and image recording of cross-sectional test pieces</li>
<li>Platinum deposition: platinum coating and image recording</li>
<li>Observation and analysis of abnormality in the process: circuit repair, cutting, coating and image recording of solid-state electronic components</li>
<li>Crystal phase analysis and observation</li>
<li>The machine is equipped with energy dispersive mass spectrometer (EDX), which can be used for qualitative and semi-quantitative analysis of elemental components</li>
</ul>
</li>
<li>Important specs:
<ul>
<li>Electron source: field emission type</li>
<li>Ion source: Ga liquid metal ion source</li>
<li>Accelerating voltage: electron beam—200V~30kV, ion beam—</li>
<li>500V~30kV</li>
<li>Image resolution: SEM—1.5nm at 15kV, FIB—2.5nm at 30kV</li>
<li>Working distance: 5mm</li>
<li>Specimen specification: diameter (10mm dia ) x height (<0.50cm)</li>
<li>Magnification SEM: 4x~1Mx, FIB: 150x~1Mx</li>
<li>GIS, Pt, SiO<sub>2</sub></li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612093958603.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
</div>Precautions<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Precautions</strong></div>
<ol>
<li>Restricted use of FIB machine materials:
<ul>
<li>Magnetic materials</li>
<li>All powder and other electron beams will decompose or release gaseous materials</li>
<li>Substances with low melting point</li>
<li>The alloy material contains magnetic material higher than 5%</li>
</ul>
</li>
<li>The user must explain the production method of the test piece in detail. If the vacuum chamber may be polluted, the unit has the right to refuse to accept it. Those who make an appointment should fill in the application form three days before the experiment (please draw the top view and cross-section of the sample and the observation position, and indicate the material and thickness of each layer), and send the file to the technical staff for review.</li>
<li>If the machine is damaged or polluted due to improper handling of the test piece, it shall be liable for compensation. The compensation fee is evaluated by the original factory and implemented after the decision of the management committee.</li>
<li>The diameter of the test piece is about 10mm dia, and the height is less than 0.5cm. If it is a special size, please contact the administrator in advance to confirm whether it is suitable for the experiment.</li>
<li>Semiconductor, poor conductivity and insulator test pieces need to be coated with a conductive film (gold or platinum is preferred), and no coating treatment is provided on site.</li>
<li>Please bring your own blank disc to access the data. In order to avoid equipment poisoning, disable the USB flash drive for image file transfer.</li>
<li>Please prepare your own copper mesh for TEM test piece production. One piece is produced every 3 hours, and the client and the teaching assistant work together to place the test piece on the self-provided copper grid using OM. Because the material of the test piece will affect the adsorption effect of the glass needle, if the copper mesh is not successfully placed, it will not be supplemented.</li>
<li>Other payment instructions:
<ul>
<li>Platinum electrode payment: no charge for platinum electrode plating time within 0.1%. The pricing method of more than 0.1% is 200 yuan in cash per 0.1%. Please take the payment note to the Nano Center for payment after the experiment</li>
<li>EDX payment: The EDX of this machine can be used for Mapping / Line Scan / qualitative and semi-quantitative analysis, with an additional charge of 600 yuan per hour.</li>
</ul>
</li>
<li>If the sample is found to be non-compliant during the analysis and testing, the sample will be returned and paid for the time slot of its appointment. Please send the experimental samples for testing. The user should be present to explain the content to be analyzed.</li>
<li>The reservation limit of your instrument system is: each program host can only make two reservations per month. The machine opening appointment time is 9:00 am on the 25th of each month, and the next month's experiment will be reserved. If you need to cancel the experiment time after the appointment, please log in to your system five days before to cancel, otherwise you will still need to deduct.</li>
<li>Self-operation: From 9:00 a.m. on the 25th of each month, make an appointment for the experiment from the 1st to the 15th of the next month; from 9:00 a.m. on the 10th of the current month, make an appointment for the experiment from the 16th to the end of the month, each person is limited to one appointment per echelon. The reservation needs to be canceled 2 days before: If the cancellation is not made 2 days before, the payment will not be deducted; And if no one can use it as a substitute during this period, a fee will be charged.</li>
<li>If you fail to make an appointment without a reason, the time slot will be automatically deducted; if you are more than 15 minutes late, the appointment time slot will be deducted and the service will be cancelled.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/fib%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%96%b9%e5%bc%8f/" rel="noreferrer noopener" target="_blank" title="How to apply(Open New Windows)">How to apply</a></li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>FIB instrument <a href="/userfiles/orden/files/20240612094019625.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612094035511.pdf" rel="noreferrer noopener" target="_blank" title="Examination content(pdf)(Open New Windows)">Examination content</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li>In the event of a national holiday, machine failure maintenance or replacement of consumables during the reservation period, the period will be cancelled and will not be made up.</li>
<li><a href="https://vir.nstc.gov.tw/" rel="noreferrer noopener" target="_blank" title="National Science Council Basic Research Core Facility Reservation Service(Open New Windows)">NSTC Basic Research Core Facility Reservation Service</a> management system (get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is an NSTC project, please come to the NSTC Basic Research Core Facility Reservation Service management system (https://vir.nstc.gov.tw/home/Index). Make an appointment and get the appointment number, then download the <a href="/userfiles/orden/files/20240612094054829.odt" rel="noreferrer noopener" target="_blank" title="FIB OEM Application Form(odt)(Open New Windows)">FIB OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without an NSTC project, please download the <a href="/userfiles/orden/files/20240612094054829.odt" rel="noreferrer noopener" target="_blank" title="FIB OEM Application Form(odt)(Open New Windows)">FIB OEM Application Form</a>. Submit the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">Please bring your own blank CD</li>
<li class="ed_txt">Cash charges for consumables (NT$500 per test strip cleaning)</li>
<li class="ed_txt">Cost inquiry link：https://vir.nstc.gov.tw/VI_SearchResult?item=1</li>
</ol>
</div>https://ord.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168746622876651520&init=YDUAL BEAM [FOCUSED ION BEAM & ELECTRON BEAM] SYSTEMhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication