<![CDATA[Oxidative & Diffusion Furnaces]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Oxidative Diffusion System" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1169172716977131520&init=N" /></div>
<ul>
<li class="ed_txt"><a href="https://nanofc.web.nycu.edu.tw/%e6%b0%a7%e5%8c%96%e6%93%b4%e6%95%a3%e7%b3%bb%e7%b5%b1oxidation-diffusion-furnaces/" rel="noreferrer noopener" target="_blank" title="OXIDATION & DIFFUSION FURNACES(Open New Windows)">OXIDATION & DIFFUSION FURNACES</a><br />
Brand Model: Senji SJ-CA1200-D4</li>
<li class="ed_txt"><strong>Instrument expert: Prof. </strong> <strong>Liu, Po-Tsun</strong><br />
03-5712121 ext 52994</li>
<li class="ed_txt"><strong>Instrument consulting and operation services: Ms. Ni, Yuech Chen</strong><br />
03-5712121 ext 55668, 55610<br />
Email <a href="mailto:mailto:yeni@nycu.edu.tw" title="yeni@nycu.edu.tw">yeni@nycu.edu.tw</a></li>
<li class="ed_txt"><strong>Instrument location: Room 121, Solid State Electronic Systems Building, Guanfu Campus</strong></li>
</ul>
</div>]]>NanofabricationInstrumentation Resource Center 2026-05-20Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><strong><a href="https://nanofc2.web.nycu.edu.tw/oxidation-diffusion-furnaces/" title="Link to Nano Center Introduction Page">Nano Facility Center</a><br />
<br />
Instrument Information</strong></div>
<ol>
<li>Brand model: Senji SJ-CA1200-D4</li>
<li>Purchase period: December 2012</li>
<li>Location: Room 121, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616) </li>
<li>Function:
<ul>
<li> Wet oxygen oxidation, dry oxygen oxidation (dry & wet oxidation)</li>
<li>N-type, P-type wafer (annealed)</li>
<li>SiO<sub>2</sub> /Si，High-K /Si.Ge (Sintering)</li>
<li>Al annealing</li>
</ul>
</li>
<li>Important specs:
<ul>
<li>The maximum heating temperature is 1100°C</li>
<li>The length of the heating zone is 900mm, and the diameter of the furnace tube is 6″</li>
<li>Constant temperature zone 600mm ±1°C at 1000°C (three-point measurement)</li>
<li>0~1100°C heating time for 2 hours</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612092639661.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a></li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Need to have <a href="https://nanofc.web.nycu.edu.tw/%e6%bf%95%e5%bc%8f%e5%b7%a5%e4%bd%9c%e5%8f%b0-wet-bench/" rel="noreferrer noopener" target="_blank" title="Wet Bench(Open New Windows)">Wet Bench</a> Only use permission can apply for the use of the oxidation diffusion system.</li>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>Oxidative Diffusion System <a href="/userfiles/orden/files/20240612092658457.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612092712580.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li>NSTC Basic Research Core Facility Reservation Service Management System (get serial number)</li>
<li><a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
<li>Management and usage:
<ul>
<li>The furnace tube is reserved for use in four hours as a section, and the applicable furnace tubes are Wet Oxidation, P<sup>+</sup> Annealing, N<sup>+</sup> Annealing, Dry Oxidation and other furnace tubes.</li>
<li>Each furnace tube has a maximum of three sections (three sections) for the reserved process use time, and the same furnace tube is reserved for a maximum of two (including two) process use times within a week.</li>
<li>Reservation method: You can make reservations for the current week and the next week together every week.</li>
<li>If the reservation is cancelled due to an unexpected situation, which makes it impossible to operate the equipment within the reservation period, the reservation registration should be cancelled three hours before the reservation. Other users operate and use it.</li>
<li>Those who fail to show up for more than 30 minutes will be deemed to have cancelled the reservation, and the time slot can be used by other users.</li>
<li>After the experiment is completed, the use record book should be filled out. </li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Delegate to operate the instrument:</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first NSTC Basic Research Core Facility Reservation Service Management System (https://vir.nstc.gov.tw/home/Index) Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612092731516.odt" rel="noreferrer noopener" target="_blank" title="Oxidation Diffusion System OEM Application Form(odt)(Open New Windows)">Oxidation Diffusion System OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without an NSTC project, please download the Oxidation Diffusion System OEM Application Form directly. Submit the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li class="ed_txt"><span style="color:#ff0000;"><strong>Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</strong></span></li>
<li class="ed_txt">This center stipulates that the maximum temperature is 1100oC, for 3″ and 4″ wafers, with a maximum of 25 wafers at a time.</li>
<li class="ed_txt">Parts of an hour are counted as one hour.</li>
<li class="ed_txt">The wafer entering the furnace tube must be cleaned first. Please refer to the cleaning fee for details. <a href="https://nanofc.web.nycu.edu.tw/%e6%bf%95%e5%bc%8f%e5%b7%a5%e4%bd%9c%e5%8f%b0-wet-bench/" rel="noreferrer noopener" target="_blank" title="Wet_Bench(Open New Windows)">Wet_Bench</a> Fee Schedule.</li>
<li class="ed_txt">Payment method:
<ul>
<li class="ed_txt">Self-operation: charge start-up fee + production fee</li>
<li class="ed_txt">Entrusted operation: charge start-up fee + production fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt">Cost inquiry link：https://vir.nstc.gov.tw/VI_SearchResult?item=1</li>
</ol>
</div>https://ord.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169172716977131520&init=YOxidative Diffusion Systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication