{"subject":"High Density Plasma Active Ion Etching System","detailContent":"
\r\n
\"High
\r\n\r\n
\r\n\r\n
\r\n
","dataClassName":"Nanofabrication","pubUnitName":"Instrumentation Resource Center ","posterDate":null,"updateDate":"2026-05-21","liaisonper":null,"liaisontel":null,"liaisonfax":null,"liaisonemail":null,"languageurl":null,"page1Title":"Instrument introduction","page1":"
\r\n
Nano Facility Center
\r\n
\r\nInstrument Information
\r\n\r\n
    \r\n\t
  1. Brand Model: SAMCO – RIE-10N
    2. \r\n\t
  2. Purchase period: March 1999
    3. \r\n\t
  3. Place of placement: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55666) 
    4. \r\n\t
  4. Function: dry etching, mainly etching Al material
    5. \r\n\t
  5. IMPORTANT SPECIFICATIONS: Use Gas Contains BCl3, Cl2、CF4、CHF3, Ar, O2, SF6, ICP RF maximum power 900W, Bias RF maximum power 300W, cooled by He gas system, mainly 4″ wafer
    6. \r\n\t
  6. The instrument can be used with special process material.
    7. \r\n
\r\n
","page2Title":"Precautions","page2":"
\r\n
Precautions
\r\n\r\n
    \r\n\t
  1. Please specify the material of the substrate wafer, what kind of substance is contained on it (such as SiO2, photoresist, etc.) and whether to clean the wafer.
    2. \r\n\t
  2. If there is no special requirement for etching, it will be done according to the central standard process.
    3. \r\n
\r\n
","page3Title":"Do-it-yourself regulations","page3":"
\r\n
self-operated instrument
\r\n\r\n
    \r\n\t
  1. Instructions for obtaining the permission to use the instrument:\r\n\t\r\n\t
    2. \r\n\t
  2. Instrument opening level and number of people.
    3. \r\n\t
  3. After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:\r\n\t\r\n\t
    4. \r\n
\r\n
","page4Title":"Delegated Operation Regulations","page4":"
\r\n
Commissioning the operation of the instrument
\r\n\r\n
    \r\n\t
  1. If there is an NSTC project, please go to the NSTC Basic Research Core Facility Reservation Service Management system (https://vir.nstc.gov.tw/home/Index). Make a reservation and get the reservation number, then download the HDP-RIE OEM Application Form. Submit the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
    2. \r\n\t
  2. For those without an NSTC project, please download the HDP-RIE OEM Application Form, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
    3. \r\n
\r\n
","page5Title":"Charges","page5":"
\r\n
Charge information
\r\n\r\n
    \r\n\t
  1. Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.
    2. \r\n\t
  2. charging method\r\n\t
      \r\n\t\t
    • Do it yourself: charge a fee
      • \r\n\t\t
    • Entrusted operation: charging usage fee + OEM fee
      • \r\n\t
    \r\n\t
    3. \r\n\t
  3. Cost inquiry link：https://vir.nstc.gov.tw/VI_SearchResult?item=1
    4. \r\n
\r\n
","page6Title":"References","page6":"
\r\n
2022 Yangming Jiaotong University Instrument Resource Center Basic Research Core Facilities Online Technology Sharing Conference Video
\r\n
","page7Title":null,"page7":null,"page8Title":null,"page8":null,"docs":[],"images":[{"fileurl":"https://ord.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168760241987260416&init=Y","expFile":"High Density Active Ion Etching System"}],"videos":[],"audios":[],"resources":[{"relateURL":"https://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990","relateName":"List of Instruments"},{"relateURL":"https://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992","relateName":"Basic Service-Nanofabrication"},{"relateURL":"https://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=b0eb6b98-f5d6-41d5-84c6-cc35e6ce12a9","relateName":"Shallow Si RIE"},{"relateURL":"https://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=808d86c1-e68b-4c05-93cd-0a4b85ed637b","relateName":"Si Deep-RIE"}]}