{"subject":"Laser Pattern Generator","detailContent":"
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\"Laser
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","dataClassName":"Nanofabrication","pubUnitName":"Instrumentation Resource Center ","posterDate":null,"updateDate":"2026-05-20","liaisonper":null,"liaisontel":null,"liaisonfax":null,"liaisonemail":null,"languageurl":null,"page1Title":"Instrument introduction","page1":"
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Nano Facility Center
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\r\nInstrument Information
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  1. Brand Model: HIMT DWL-200
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  2. Purchase period: April 2007
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  3. Location: Room 139, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616) 
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  4. Function: Manufacture of glass photomasks (4", 5" and 6"), 5-inch quartz photomasks (contact)
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  5. Important specs:\r\n\t
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    • Laser light source 442nm(g-line) Helium _Cadmium LASER Power 125mW
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    • Minimum feature size is .80um
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    • Maximum effective area 200mm x 200mmdeposition)
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    • *.dxf file of GDSII and Auto CAD
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    • Dual CCD camera alignment system
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  6. The instrument can be used with special process material.
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","page2Title":"Precautions","page2":"
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Mask Making Instructions
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","page3Title":"service items","page3":"
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Commissioning the operation of the instrument
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  1. If you have an NSTC grant, please first make a reservation and obtain a reservation number through the NSTC Core Facilities for Basic Research Service Management System (https://vir.nstc.gov.tw/home/Index). Then, download DWL-200 OEM Application Form, and send the completed application form and materials to our center (2F, Solid State Electronic System Building of our school) for the instrument management personnel to assist in scheduling OEM.
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  2. If you do not have an NSTC project, please download the DWL-200 OEM Application Form directly. Submit the completed application form and materials to our center (2F, Solid State Electronic System Building of our school) for the instrument management personnel to assist in scheduling OEM.
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","page4Title":"Charges","page4":"
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Charge information
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  1. Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.
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  2. Cost inquiry link：https://vir.nstc.gov.tw/VI_SearchResult?item=1
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","page5Title":null,"page5":null,"page6Title":null,"page6":null,"page7Title":null,"page7":null,"page8Title":null,"page8":null,"docs":[],"images":[{"fileurl":"https://ord.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1169168370554114048&init=Y","expFile":"Laser Pattern Generator"}],"videos":[],"audios":[],"resources":[{"relateURL":"https://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990","relateName":"List of Instruments"},{"relateURL":"https://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992","relateName":"Basic Service-Nanofabrication"},{"relateURL":"https://ord.nycu.edu.tw/ord/en/app/machine/view?module=corefacilities&id=1990&serno=e990525c-7264-448e-ad41-ee81154b5695","relateName":"Pattern Generator"}]}