{"subject":"Plasma-Enhanced Chemical Vapor Deposition (PECVD)","detailContent":"
\r\n
\"Plasma
\r\n\r\n
\r\n\r\n
\r\n
","dataClassName":"Nanofabrication","pubUnitName":"Instrumentation Resource Center ","posterDate":null,"updateDate":"2026-05-20","liaisonper":null,"liaisontel":null,"liaisonfax":null,"liaisonemail":null,"languageurl":null,"page1Title":"Instrument introduction","page1":"
\r\n
Nano Facility Center
\r\n
\r\nInstrument Information
\r\n\r\n
    \r\n\t
  1. Brand Model: Samco
    2. \r\n\t
  2. Year of purchase: July 1998
    3. \r\n\t
  3. Place of placement: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55666) 
    4. \r\n\t
  4. Function: grow thin films such as SiO2 and Si3N4
    5. \r\n\t
  5. Important specs:\r\n\t
      \r\n\t\t
    • Usable wafer size: Fragment to 4 inches
      • \r\n\t\t
    • Single cavity: Chamber temperature 300°C
      • \r\n\t\t
    • The gases used include: N2O, NH3, CF4, SiH4+Ar, N2, etc., which can provide low temperature film deposition of SiO2 and Si3N4
      • \r\n\t
    \r\n\t
    6. \r\n\t
  6. The instrument can be used with special process material
    7. \r\n
\r\n
","page2Title":"Do-it-yourself regulations","page2":"
\r\n
self-operated instrument
\r\n\r\n
    \r\n\t
  1. Instructions for obtaining the permission to use the instrument:\r\n\t\r\n\t
    2. \r\n\t
  2. Instrument opening level and number of people.
    3. \r\n\t
  3. After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:\r\n\t\r\n\t
    4. \r\n
\r\n
","page3Title":"Delegated Operation Regulations","page3":"
\r\n
Commissioning the operation of the instrument
\r\n\r\n
    \r\n\t
  1. If there is a National Academy of Sciences, please come first NSTC Basic Research Core Facility Reservation Service Management System  (https://vir.nstc.gov.tw/home/Index)Make an appointment and get the appointment number, then download PECVD OEM Application Form, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
    2. \r\n\t
  2. For those without an NSTC project, please download the PECVD OEM Application Form directly, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
    3. \r\n
\r\n
","page4Title":"Charges","page4":"
\r\n
Charge information
\r\n\r\n
    \r\n\t
  1. Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.
    2. \r\n\t
  2. charging method\r\n\t
      \r\n\t\t
    • Self-operation: charge start-up fee + production fee
      • \r\n\t\t
    • Entrusted operation: charge start-up fee + production fee + OEM fee
      • \r\n\t
    \r\n\t
    3. \r\n\t
  3. Cost inquiry link：https://vir.nstc.gov.tw/VI_SearchResult?item=1
    4. \r\n
\r\n
","page5Title":null,"page5":null,"page6Title":null,"page6":null,"page7Title":null,"page7":null,"page8Title":null,"page8":null,"docs":[],"images":[{"fileurl":"https://ord.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168726640084127744&init=Y","expFile":"Plasma Assisted Chemical Vapor Deposition System"}],"videos":[],"audios":[],"resources":[{"relateURL":"https://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990","relateName":"List of Instruments"},{"relateURL":"https://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992","relateName":"Basic Service-Nanofabrication"}]}