<![CDATA[Low Pressure Chemical Vapor Deposition System]]><![CDATA[<div class="ed_model05 clearfix">
<div class="ed_pic_right"><img alt="Low pressure chemical vapor deposition system" src="/ord/en/app/machine/image?module=corefacilities&detailNo=1168722692765913088&init=N" /></div>
<div class="ed_list">
<ul>
<li><a href="https://nanofc.web.nycu.edu.tw/%e4%bd%8e%e5%a3%93%e5%8c%96%e5%ad%b8%e6%b0%a3%e7%9b%b8%e6%b2%89%e7%a9%8d%e7%b3%bb%e7%b5%b1-low-pressure-chemical-vapor-deposition-lpcvd/" rel="noreferrer noopener" target="_blank" title="Low Pressure Chemical Vapor Deposition (LPCVD)(Open New Windows)"><strong>Low Pressure Chemical Vapor Deposition (LPCVD)</strong></a><br />
Brand Model: SJ-10301001-1</li>
<li><strong>Instrument expert: Prof. Liu, Po-Tsun</strong><br />
03-5712121 ext 52994</li>
<li><strong>Instrument consulting and operation services: Mr. Lai, White</strong><br />
03-5712121 ext 55606, 55616<br />
Email <a href="mailto:white@nycu.edu.tw" title="white@nycu.edu.tw">white@nycu.edu.tw</a></li>
<li><strong>Instrument location: Laboratory 127, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus</strong></li>
</ul>
</div>
</div>]]>NanofabricationInstrumentation Resource Center 2026-05-20Instrument introduction<div class="ed_model01 clearfix">
<div class="ed_txt"><a href="https://nanofc2.web.nycu.edu.tw/low-pressure-chemical-vapor-deposition-lpcvd/" title="Link to Nano Center Introduction Page">Nano Facility Center</a><br />
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<strong>Instrument Information</strong></div>
<ol>
<li>Brand Model: SJ-10301001-1</li>
<li>Purchase period: December 28, 2014</li>
<li>Place of placement: Laboratory 127, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616) </li>
<li>Function:
<ul>
<li>(1).Chamber: 6″, the length of the uniform temperature zone is 600mm</li>
<li>(2). Vacuum: 5*10<sup>-3</sup> Torr</li>
<li>(3). Temperature: POLY-Si-620°C, Si3N4-800°C, TEOS-700°C</li>
</ul>
</li>
<li>Important specs:
<ul>
<li>(1).Poly-Si in-situ phosphine (Poly-Si in-situ PH3): Temperature: 585°C Gas: SiH4, PH3 Pressure: 500mtorr</li>
<li>(2). Polycrystalline silicon and amorphous silicon deposition (poly-Si & amorphous-Si), silicon germanium deposition (SiGe): temperature: 620°C/550°C gas: SiH4, GeH4 pressure: 300mtorr</li>
<li>(3). Deposition of Silicon Nitride (Si3N4): Temperature: 800°C/850°C Gas: SiH2Cl2, NH3 Pressure: 120mtorr</li>
<li>(4). Deposition of TEOS: Temperature: 700°C Gas: TEOS Pressure: 120mtorr</li>
</ul>
</li>
<li>The instrument can be used with <a href="/userfiles/orden/files/20240612092823770.pdf" rel="noreferrer noopener" target="_blank" title="special process material(pdf)(Open New Windows)">special process material</a>.</li>
</ol>
</div>Do-it-yourself regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>self-operated instrument</strong></div>
<ol>
<li>Need to have<a href="https://nanofc.web.nycu.edu.tw/%e6%bf%95%e5%bc%8f%e5%b7%a5%e4%bd%9c%e5%8f%b0-wet-bench/" rel="noreferrer noopener" target="_blank" title="Wet Bench(Open New Windows)">Wet Bench</a>Only use permission can apply to use the LPCVD system.</li>
<li>Instructions for obtaining the permission to use the instrument:
<ul>
<li>(1).<a href="https://nanofc.web.nycu.edu.tw/%e5%a5%88%e7%b1%b3%e4%b8%ad%e5%bf%83%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="Daytime permission application process description(Open New Windows)">Daytime permission application process description</a> (Using permission is Monday to Friday 8:00~17:00)</li>
<li>(2).<a href="https://nanofc.web.nycu.edu.tw/24%e5%b0%8f%e6%99%82%e5%90%ab%e5%81%87%e6%97%a5%e9%96%80%e7%a6%81%e5%8f%8a%e8%a8%ad%e5%82%99%e6%ac%8a%e9%99%90%e7%94%b3%e8%ab%8b%e6%b5%81%e7%a8%8b/" rel="noreferrer noopener" target="_blank" title="24-hour application process description(Open New Windows)">24-hour application process description</a> (You need to have daytime permission to apply)</li>
<li>(3).<a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e7%94%b3%e8%ab%8b%e6%b3%a8%e6%84%8f%e4%ba%8b%e9%a0%85/" rel="noreferrer noopener" target="_blank" title="Precautions(Open New Windows)">Precautions</a> (Be sure to read carefully, so as not to lose your own rights)</li>
<li>(4).LPCVD instrument <a href="/userfiles/orden/files/20240612092843979.pdf" rel="noreferrer noopener" target="_blank" title="Operating Specifications(pdf)(Open New Windows)">Operating Specifications</a> & <a href="/userfiles/orden/files/20240612092904979.pdf" rel="noreferrer noopener" target="_blank" title="Exam record sheet(pdf)(Open New Windows)">Exam record sheet</a></li>
</ul>
</li>
<li><a href="https://nanofc.web.nycu.edu.tw/%e5%84%80%e5%99%a8%e9%96%8b%e6%94%be%e7%ad%89%e7%b4%9a%e3%80%81%e4%ba%ba%e6%95%b8%e3%80%81%e8%a8%93%e7%b7%b4%e6%ac%a1%e6%95%b8open-level-open-people-training-times/" rel="noreferrer noopener" target="_blank" title="Instrument opening level and number of people.(Open New Windows)">Instrument opening level and number of people.</a></li>
<li>After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
<ul>
<li>(1).NSTC Basic Research Core Facility Reservation Service Management System (get serial number)</li>
<li>(2).<a href="https://nfcmachin.ece.nycu.edu.tw/" rel="noreferrer noopener" target="_blank" title="Nano Center Instrument Reservation System(Open New Windows)">Nano Center Instrument Reservation System</a> (Use time slot reservation)</li>
</ul>
</li>
</ol>
</div>Delegated Operation Regulations<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Commissioning the operation of the instrument</strong></div>
<ol>
<li>If there is a National Academy of Sciences, please come first NSTC Basic Research Core Facility Reservation Service Management System (https://vir.nstc.gov.tw/home/Index) Make an appointment and get the appointment number, then download <a href="/userfiles/orden/files/20240612092929509.odt" rel="noreferrer noopener" target="_blank" title="LPCVD OEM Application Form(odt)(Open New Windows)">LPCVD OEM Application Form</a>, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
<li>For those without an NSTC project, please download the LPCVD OEM Application Form directly, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.</li>
</ol>
</div>Charges<div class="ed_model01 clearfix">
<div class="ed_txt"><strong>Charge information</strong></div>
<ol>
<li><strong><span style="color:#ff0000;">Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.</span></strong></li>
<li class="ed_txt">charging method
<ul>
<li class="ed_txt">Self-operation: charge start-up fee + production fee</li>
<li class="ed_txt">Entrusted operation: charge start-up fee + production fee + OEM fee</li>
</ul>
</li>
<li class="ed_txt">Cost inquiry link：https://vir.nstc.gov.tw/VI_SearchResult?item=1</li>
</ol>
</div>https://ord.nycu.edu.tw/ord/en/app/machine/image?module=corefacilities&detailNo=1168722692765913088&init=YLow pressure chemical vapor deposition systemhttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1990List of Instrumentshttps://ord.nycu.edu.tw/ord/en/app/machine/list?module=corefacilities&id=1992Basic Service-Nanofabrication