{"subject":"[Guangfu] E-beam inspection tool, eScan310","detailContent":"<div class=\"ed_model05 clearfix\">\r\n<div class=\"ed_pic_right\"><img alt=\"Electron beam wafer defect inspection equipment\" src=\"/userfiles/ordch/images/20231013150749511.jpg\" /></div>\r\n\r\n<div class=\"ed_model01 clearfix\">\r\n<ul>\r\n\t<li class=\"ed_txt\"><strong>E-beam inspection tool</strong>\r\n\r\n\t<ul>\r\n\t\t<li class=\"ed_txt\">Brand Model: HMI, eScan310</li>\r\n\t</ul>\r\n\t</li>\r\n\t<li class=\"ed_txt\"><strong>Instrument expert: Prof.&nbsp;Chang, Yi</strong>\r\n\t<ul>\r\n\t\t<li class=\"ed_txt\">ext 31536</li>\r\n\t</ul>\r\n\t</li>\r\n\t<li class=\"ed_txt\"><strong>Instrument Operation Technician: Mr. Lin, Tsun-Guang</strong>\r\n\t<ul>\r\n\t\t<li class=\"ed_txt\">ext 59495</li>\r\n\t\t<li class=\"ed_txt\">Email&nbsp;<a href=\"mailto:tglin@nctu.edu.tw\" title=\"tglin@nctu.edu.tw\">tglin@nctu.edu.tw</a></li>\r\n\t</ul>\r\n\t</li>\r\n\t<li class=\"ed_txt\"><strong>Instrument location: Room SC030, Science Building 3</strong></li>\r\n</ul>\r\n\r\n<div class=\"ed_txt\">&nbsp;</div>\r\n</div>\r\n</div>","dataClassName":null,"pubUnitName":"Instrumentation Resource Center                                                                     ","posterDate":null,"updateDate":"2023-10-30","liaisonper":null,"liaisontel":null,"liaisonfax":null,"liaisonemail":null,"languageurl":null,"page1Title":"Instrument introduction","page1":"<div class=\"ed_model01 clearfix\">\r\n<div class=\"ed_txt\"><strong>Instrument brand, model, year of purchase</strong><br />\r\nBrand: HMI<br />\r\nModel: eScan310<br />\r\nYear of Purchase: Donated by Hanmin Microtest Company in March 2012<br />\r\n<br />\r\n<strong>Important Specifications</strong></div>\r\n\r\n<ul>\r\n\t<li class=\"ed_txt\">The sample measured has defect detection and scale line width more significant than 20 nanometers</li>\r\n\t<li class=\"ed_txt\">The total height after placement on the stage shall not be greater than or less than 850 microns</li>\r\n</ul>\r\n</div>","page2Title":"Service items and opening hours","page2":"<div class=\"ed_model01 clearfix\">\r\n<div class=\"ed_txt\"><strong>Services</strong></div>\r\n\r\n<ul>\r\n\t<li class=\"ed_txt\">Sample defect detection</li>\r\n\t<li class=\"ed_txt\">Sample scale measurement</li>\r\n\t<li class=\"ed_txt\">This equipment has an application range of up to nanometer size and can observe a wide range of materials. Experts and scholars in different fields, such as physics, chemistry, materials, electronics, optoelectronics, and biology, are highly welcome to use this machine to engage in related research. Scholars in electrical machinery, machinery, information, optics, and other fields are also welcome to put forward new opinions on the application and functional improvement of electron beams.</li>\r\n</ul>\r\n\r\n<div class=\"ed_txt\"><strong>Opening hours</strong></div>\r\n\r\n<ol>\r\n\t<li class=\"ed_txt\">Monday to Friday: 08:30~05:30</li>\r\n\t<li class=\"ed_txt\">Nights, Saturdays and Sundays: closed</li>\r\n</ol>\r\n</div>","page3Title":"System open level","page3":"<div class=\"ed_model01 clearfix\">\r\n<div class=\"ed_txt\"><strong>System opening level</strong></div>\r\n\r\n<ol>\r\n\t<li class=\"ed_txt\">General working hours: D</li>\r\n\t<li class=\"ed_txt\">Night and holiday hours: Closed</li>\r\n</ol>\r\n\r\n<div class=\"ed_txt\"><strong><u>System opening level description</u></strong></div>\r\n\r\n<ul>\r\n\t<li class=\"ed_txt\">Level A: Open to students who need to use it. They can operate it on their own after training and assessment.</li>\r\n\t<li class=\"ed_txt\">Level B: Each professor nominates one student for training, while the rest operate under those who have been trained. Professors with multiple students using the instrument can request an increase in the number of students receiving training.</li>\r\n\t<li class=\"ed_txt\">Level C: The instrument administrator selects several students recommended by the professor to receive training. After passing the assessment, they can self-operate the instrument and be responsible for delegated operation service.</li>\r\n\t<li class=\"ed_txt\">Level D: The laboratory&#39;s technical staff only accept delegated services and are unavailable for general use.</li>\r\n</ul>\r\n</div>","page4Title":"Charges","page4":"<div class=\"ed_model06 clearfix\">\r\n<div class=\"ed_txt\">(This machine is not open for self-operation) Delegated operation</div>\r\n\r\n<div class=\"table01\">\r\n<table class=\"ed_table caption-top\" summary=\"Charging standard\">\r\n\t<caption>UnitCharging standard (unit: NTD)</caption>\r\n\t<thead>\r\n\t\t<tr>\r\n\t\t\t<th scope=\"col\" style=\"width:40%\">Unit</th>\r\n\t\t\t<th scope=\"col\" style=\"width:30%\">Academic unit<br />\r\n\t\t\tNon-savings/savings members</th>\r\n\t\t\t<th scope=\"col\" style=\"width:30%\">Manufacturers and research units<br />\r\n\t\t\tNon-savings/savings members</th>\r\n\t\t</tr>\r\n\t</thead>\r\n\t<tbody>\r\n\t\t<tr>\r\n\t\t\t<td class=\"ed_pc_center\" data-th=\"Unit\" scope=\"row\">Off-campus</td>\r\n\t\t\t<td data-th=\"Academic unitNon-savings/savings members\">2300/2000</td>\r\n\t\t\t<td data-th=\"Manufacturers and research unitsNon-savings/savings members\">3000/2700</td>\r\n\t\t</tr>\r\n\t\t<tr>\r\n\t\t\t<td class=\"ed_pc_center\" data-th=\"Unit\" scope=\"row\">On campus</td>\r\n\t\t\t<td data-th=\"Academic unitNon-savings/savings members\">1500/1200</td>\r\n\t\t\t<td data-th=\"Manufacturers and research unitsNon-savings/savings members\">&mdash;</td>\r\n\t\t</tr>\r\n\t\t<tr>\r\n\t\t\t<td class=\"ed_pc_center\" data-th=\"Unit\" scope=\"row\">Industry-university cooperative research project approved by the R&amp;D Department</td>\r\n\t\t\t<td data-th=\"Academic unitNon-savings/savings members\">Free</td>\r\n\t\t\t<td data-th=\"Manufacturers and research unitsNon-savings/savings members\">&mdash;</td>\r\n\t\t</tr>\r\n\t</tbody>\r\n</table>\r\n</div>\r\n</div>\r\n\r\n<div class=\"ed_model01 clearfix\">\r\n<div class=\"ed_txt\"><br />\r\nNote: Academic units refer to colleges and universities. &nbsp;</div>\r\n</div>","page5Title":"Management and Usage","page5":"<div class=\"ed_model01 clearfix\">\r\n<div class=\"ed_txt\"><strong>Management and Usage Methods</strong></div>\r\n\r\n<ol>\r\n\t<li class=\"ed_txt\">Request usage application from instrument technician/assistant.</li>\r\n\t<li class=\"ed_txt\">The instrument technician/assistant will issue a payment note to the user after the experiment is completed.</li>\r\n\t<li class=\"ed_txt\">Users are requested to bring the payment notice to the cashier team for payment.&nbsp;Then,&nbsp;submit the payment notice and a copy of the receipt to the instrument technician.</li>\r\n\t<li class=\"ed_txt\">On-campus project transfer: Users can directly transfer funds to various projects implemented by professors in the school.<br />\r\n\t(Please download the transfer approval form for on-campus users of the common instrument from <a href=\"https://ord.nycu.edu.tw/ord/ch/app/data/list?module=nycu0039&amp;id=1896\" title=\"Downloads\">Downloads</a>). After the user fills it out, ask the project leader to sign it and submit it to the instrument technician.</li>\r\n</ol>\r\n</div>","page6Title":"Instrument Reservation","page6":"<div class=\"ed_model01 clearfix\">\r\n<div class=\"ed_txt\"><strong>This machine is not open for self-operation training.</strong></div>\r\n</div>\r\n\r\n<div class=\"ed_model22 clearfix\">\r\n<div class=\"ed_model22 clearfix\">\r\n<div class=\"row w-100 mx-0\">\r\n<ul class=\"col-12 col-md-4\">\r\n\t<li class=\"full-name\">Mr. Lin, Tsun-Guang</li>\r\n\t<li class=\"job-title\">Instrument operation technician</li>\r\n\t<li class=\"li\"><img alt=\"phone\" src=\"/userfiles/editor/ic_phone.svg\" /> 59495 (Room SC030, Basic Sciences Building)</li>\r\n\t<li class=\"li\"><img alt=\"mail\" src=\"/userfiles/editor/ic_mail.svg\" /> <a href=\"mailto:tglin@nctu.edu.tw\" title=\"tglin@nctu.edu.tw\">tglin@nctu.edu.tw</a></li>\r\n</ul>\r\n</div>\r\n</div>\r\n</div>","page7Title":null,"page7":null,"page8Title":null,"page8":null,"docs":[],"images":[{"fileurl":"https://ord.nycu.edu.tw/ord/en/app/machine/image?module=machine&detailNo=1168378277581033472&init=Y","expFile":"Electron beam wafer defect inspection equipment eScan310"}],"videos":[],"audios":[],"resources":[{"relateURL":"https://ord.edu.tw/ord/en/app/artwebsite/view?module=artwebsite&id=2021&serno=ebdd9934-00ef-4bee-9a8a-11f305100505","relateName":"Instrument List of Guangfu and Boai Campus"},{"relateURL":"https://www.nycu.edu.tw/ord/en/app/machine/list?module=machine&id=2036","relateName":"Other EM"}]}