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NYCU Office of Research and Development

Semiconductor Process

  • Update Date:2024-05-22
  • Units:Instrumentation Resource Center
[GuanFu] Thermal Evaporator & Glove Box (TEG)
Thermal Evaporator & Glove Box Integration System (Thermal Evaporator & Glove Box)
  • Thermal Evaporator + Glove Box
    • Abbreviation: TEG
    • Brand: Shixin Technology
    • Model: evaporation machine + glove box
  • Instrument expert: Prof. Tan, Chih-Shan
  • Instrument Operation Technician: Gao, Xin-Kai
  • Instrument Location: Room 224, Nano Facility Center 
Instrument brand, model, year of purchase
Brand: Shixin Technology
Model: Evaporation machine + glove box
Purchase period: 2020

Important Specifications
  • A high vacuum dual-chamber thermal resistance evaporation system and two four-hand glove boxes are integrated into the series.
  • Thermal Evaporator: can evaporate metal electrodes and organic semiconductor materials.
  • Glove box: microbalance, heating plate, spin coater.
Services
Evaporation and organic component production.

Opening Hours
  • Monday to Friday: 09:00 ~ 17:00
  • Contact person: Gao, Xin-Kai
System opening level
  1. General working hours: Level D
  2. Night and holiday: Closed
System opening level description
  • Level A: Open to students who need to use it. They can operate it on their own after training and assessment.
  • Level B: Each professor nominates one student for training, while the rest operate under those who have been trained. Professors with multiple students using the instrument can request an increase in the number of students receiving training.
  • Level C: The instrument administrator selects several students recommended by the professor to receive training. After passing the assessment, they can self-operate the instrument and be responsible for delegated operation service.
  • Level D: The laboratory's technical staff only accept delegated services and are unavailable for general use.
Charging standards
Service Content Academic Unit Manufacturers and Research Units
Organic component production and packaging Suitable for manufacturing water-free and alcohol-free components NT$10,000 /4HR NT$15,000 /4HR

Remark:
  1. Because the component manufacturing process takes a long time, four hours is used as a basic unit.
  2. Academic units refer to colleges and universities.
Management and Usage Methods:
  1. The commissioned operation charge is NT$10,000 for four hours per session (for academic unit).
  2. The commissioned operation charge is NT$15,000 for four hours per session (for manufacturers and research units).
  3. The use of water and alcohol solvents is prohibited.
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