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NYCU Office of Research and Development

Vapor Deposition

  • Update Date:2025-02-20
  • Units:Instrumentation Resource Center
[Guangfu] Molecular Beam Epitaxy System (MBE System)
Molecular beam epitaxy system
  • Molecular beam epitaxy system
    • Abbreviation: MBE System
    • Brand: USA, SVT Associates
    • Model: Model 35-V-2
  • Instrument Expert: Prof. Chou, Wu-Ching
    • ext. 56129
  • Instrument Operation Technician: Wang, Hong-Jyun
    • ext. 56182
  • Instrument Location: Room 657, Science Building 3
Instrument brand, model, year of purchase
Brand: USA, SVT Associates
Model: Model 35-V-2
Purchase period: 2010.08.06

Important Specifications
  1. Available wafer sizes: chip to 2 inches.
  2. Primary and ion source: Zn, Cd, Mg, Se, Te, Mn, Cr, O2, N2, ZnCl2.
Services
Epitaxial growth of group 26 compound semiconductors.

Opening Hours
  1. Monday to Friday: 08:30-17:00 am.
  2. Contact person
    • Instrument Expert: Professor Chou, Wu-Ching, extension 56129
    • Instrument Operation Technician: Wang, Hong-Jyun, extension 56182
    • Instrument Location: Room 657, Science Building 3
System Opening Level
  1. General working hours: Level D
  2. Night and holiday hours: Closed
Level Description
  • Level A: Open to students who need to use it. They can operate it on their own after training and assessment.
  • Level B: Each professor nominates one student for training, while the rest operate under those who have been trained. Professors with multiple students using the instrument can request an increase in the number of students receiving training.
  • Level C: The instrument administrator selects several students recommended by the professor to receive training. After passing the assessment, they can self-operate the instrument and be responsible for delegated operation service.
  • Level D: The laboratory's technical staff only accept delegated services and are unavailable for general use.
         
Charging standards (Unit: NTD)
Delegated operation Academic unit Manufacturers and research units
(1/4) Piece 2” NT$5,000 NT$8,000
1 piece 2” NT$7,000 NT$11,000

Note: Academic units refer to colleges and universities.
Management and Usage Methods:
The technical staff of our laboratory receives delegated services

Instrument Operation Reservation:
To make a time slot reservation, you can use campus extension 56182 to confirm the experimental conditions and sample preparation with the instrument operator before the experiment.
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