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NYCU Office of Research and Development

List of Instruments

X-ray diffractometer under extreme conditions and cutting-edge femtosecond dynamic spectrum measurement system
  • X-ray diffractometer and femtosecond transient spectroscopy under extreme conditions
  • English abbreviation: Extreme-condition spectroscopy
    Brand Model: Quantum Design Opticool
  • Instrument expert: Prof. Luo, Chi-Wei
    Ext. 56196,Email
  • Instrument expert: Prof. Huang, Er-wen
    ext 55307,Email
  • Instrument consultation and operation service: Dr. Nguyen Nhat Quyen
    Ext. 56198,Email
  • Instrument location: Science Building 3, Room SC015, GF Campus
Group III or Five Molecular Beam Epitaxy System
  • III-V MOLECULAR BEAM EPITAXY SYSTEM
    Brand Model: Veeco Modular GEN II solid source III-V MBE
  • Instrument expert: Prof. Lin Sheng-Di
    ext 31240
    Email sdlin@mail.nctu.edu.tw
  • Instrument consulting and operation services: Ms. Wu, Chu-Chun
    Extension 54248, 55665
    Email isabelwu@nycu.edu.tw
  • Instrument location: Room R110, 1st Floor, Solid-State Electronics Bldg., Guanfu Campus
Laser Pattern Generator
  • LASER PATTERN GENERATOR
    Brand Model: HIMT DWL-200
  • Instrument expert: Prof. Li, Pei-wen
    ext 54210
  • Instrument consulting and operation services: Mr. Tsai, Ching-Hsiang, Mr. Ko, Ming-yi
    Mr. Ko, Ming-yi (ext. 55659, 55667)
    Email mingyi@nycu.edu.tw
    Mr. Tsai, Ching-Hsiang (ext. 55605, 55616)
    Email ch-tsai@nycu.edu.tw
  • Instrument location: Room 139, Solid State Electronic Systems Building, Guanfu Campus
Graphics Generation System
  • PATTERN GENERATOR
    Brand Model: Raith VOYAGER
  • Instrument expert: Prof. Li Pei-Wen
    ext 54210
  • Instrument consulting and operation services: Mr. Tsai, Ching-Hsiang
    Extension 55605, 55616
    Email ch-tsai@nycu.edu.tw
  • Instrument location: Room 118, Solid State Electronic Systems Building, Guanfu Campus
Mask Alignment Exposure Machine (A)
  • Double Side Mask Aligner
    Brand model: Keyi Technology AG1000-4D-DSMV
  • Instrument Expert: Associate Prof. Su, Chun-Jung
    ext 56150
    Mailbox cjsu@nycu.edu.tw
  • Instrument Operation Technician: Mr. Chao , Jerry
    Extension 55670, 55667
    Email jychaoa@nycu.edu.tw
  • Instrument location: Room 137, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
    ext 55616 
Mask Alignment Exposure Machine (B)
  • Double Side Mask Aligner
    Brand model: Keyi Technology AG1000-6N-ST
  • Instrument Expert: Assoc. Prof. Su, Chun-Jung
    ext 56150
    Mailbox cjsu@nycu.edu.tw
  • Instrument Operation Technician: Mr. Chao, Jerry 
    Extension 55670, 55667
    Email jychaoa@nycu.edu.tw
  • Instrument location: Room 137, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
    ext 55616 
Oxidative Diffusion System
  • OXIDATION & DIFFUSION FURNACES
    Brand Model: Senji SJ-CA1200-D4
  • Instrument expert: Prof.  Liu, Po-Tsun
    ext 52994
  • Instrument consulting and operation services: Mr. Lin, Sheng Chin
    Extension 55668, 55610
    Email ck1325@nycu.edu.tw
  • Instrument location: Room 121, Solid State Electronic Systems Building, Guanfu Campus
Low pressure chemical vapor deposition system
  • Low Pressure Chemical Vapor Deposition (LPCVD)
    Brand Model: SJ-10301001-1
  • Instrument expert: Prof. Liu, Po-Tsun
    ext 52994
  • Instrument consulting and operation services: Mr. Lai, White
    Extension 55606, 55616
    Email white@nycu.edu.tw
  • Instrument location: Laboratory 127, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
  • ext 55616
Plasma Assisted Chemical Vapor Deposition System
  • Plasma-Enhanced Chemical Vapor Deposition (PECVD)
    Brand Model: Samco
  • Instrument expert: Prof. Lin, Horng-Chih
    ext 54193
  • Instrument consulting and operation services: Mr. Lai, White
    Extension 55606, 55616
    Email white@nycu.edu.tw
  • Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
    ext 55666
Dielectric Active Ion Etching System A
REACTIVE ION ETCHING SYSTEM FOR DIELECTRIC MATERIALS B
Cold Field Emission Scanning Electron Microscope and Energy Dispersion Analysis Instrument
  • SEM SU-8010
    Brand Model: Hitachi SU-8010
  • Instrument expert: Prof. Tan, Chih-Shan
    ext 54146
  • Instrument consulting and operation services: Ms. Fan, Hsiu-Lan
    Ext. 55337, 55672
    Email shiulan@nycu.edu.tw
  • Instrument location: Laboratory, Room 212, 2nd Floor, Engineering Building 6, Guanfu Campus
    ext 55337
DUAL BEAM [FOCUSED ION BEAM & ELECTRON BEAM] SYSTEM
High Density Active Ion Etching System
Silicon Deep Etch System
  • Si Deep-RIE
    Brand Model: Oxford Estrelas 100
  • Instrument expert: Prof. Chen, Kuan-Neng
    ext 31558
  • Equipment management personnel: Mr. Hu, Jack
    Extension 55607, 55666
    Email jackhu@nycu.edu.tw
  • Equipment management personnel: Mr. Lee, James
    Extension 55660, 55666
    Email cwlee@nycu.edu.tw
  • Instrument location: Laboratory 116, 1st Floor, Solid State Electronic Systems Building, Guanfu Campus
    ext 55666
,total 41 records GO
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