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List of Instruments

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  • Nanofabrication

  • Update Date：2024-06-12
  • Units：Instrumentation Resource Center
Oxidative & Diffusion Furnaces
Oxidative Diffusion System
  • OXIDATION & DIFFUSION FURNACES
    Brand Model: Senji SJ-CA1200-D4
  • Instrument expert: Prof.  Liu, Po-Tsun
    ext 52994
  • Instrument consulting and operation services: Mr. Lin, Sheng Chin
    Extension 55668, 55610
    Email ck1325@nycu.edu.tw
  • Instrument location: Room 121, Solid State Electronic Systems Building, Guanfu Campus
Link to Nano Center Introduction Page

Instrument Information
  1. Brand model: Senji SJ-CA1200-D4
  2. Purchase period: December 2012
  3. Location: Room 121, Solid State Electronic Systems Building, Guanfu Campus (TEL: 55616)   
  4. Function:
    •  Wet oxygen oxidation, dry oxygen oxidation (dry & wet oxidation)
    • N-type, P-type wafer (annealed)
    • SiO2 /Si，High-K /Si.Ge (Sintering)
    • Al annealing
  5. Important specs:
    • The maximum heating temperature is 1100°C
    • The length of the heating zone is 900mm, and the diameter of the furnace tube is 6″
    • Constant temperature zone 600mm ±1°C at 1000°C (three-point measurement)
    • 0~1100°C heating time for 2 hours
  6. The instrument can be used with special process material
self-operated instrument
  1. Need to have Wet Bench Only use permission can apply for the use of the oxidation diffusion system.
  2. Instructions for obtaining the permission to use the instrument:
  3. Instrument opening level and number of people.
  4. After you have the right to use the instrument, you need to log in to the following system to obtain the serial number and make an appointment for use:
  5. Management and usage:
    • The furnace tube is reserved for use in four hours as a section, and the applicable furnace tubes are Wet Oxidation, P+ Annealing, N+ Annealing, Dry Oxidation and other furnace tubes.
    • Each furnace tube has a maximum of three sections (three sections) for the reserved process use time, and the same furnace tube is reserved for a maximum of two (including two) process use times within a week.
    • Reservation method: You can make reservations for the current week and the next week together every week.
    • If the reservation is cancelled due to an unexpected situation, which makes it impossible to operate the equipment within the reservation period, the reservation registration should be cancelled three hours before the reservation. Other users operate and use it.
    • Those who fail to show up for more than 30 minutes will be deemed to have cancelled the reservation, and the time slot can be used by other users.
    • After the experiment is completed, the use record book should be filled out. 
Delegate to operate the instrument:
  1. If there is a National Academy of Sciences, please come first National Science Council Basic Research Core Facility Reservation Service Management System Make an appointment and get the appointment number, then download Oxidation Diffusion System OEM Application Form, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
  2. For those without a national science account, please download directly Oxidation Diffusion System OEM Application Form, and send the completed application form and materials to the center (2F, Solid State Electronic System Building of the school) to assist the instrument management personnel in scheduling OEM.
Charge information
  1. Those with an accountant from the National Science Council will be priced according to the plan payment standard, and those without an accountant from the National Science Council will be priced according to the non-plan payment standard.
  2. This center stipulates that the maximum temperature is 1100oC, for 3″ and 4″ wafers, with a maximum of 25 wafers at a time.
  3. Parts of an hour are counted as one hour.
  4. The wafer entering the furnace tube must be cleaned first. Please refer to the cleaning fee for details. Wet_Bench Fee Schedule.
  5. Payment method:
    • Self-operation: charge start-up fee + production fee
    • Entrusted operation: charge start-up fee + production fee + OEM fee
  6. Cost inquiry link
     
List of Instruments Basic Service-Nanofabrication
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